Integrated circuit capacitor

Details Integrated circuit capacitor Integrated circuit capacitor

1995-06-06

1997-08-05

Ngo, Ngan V.

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Passive components in ics

257301, 257304, 257535, H01L 2900

Patent

active

056545819

ABSTRACT:
An integrated circuit with a capacitor includes a conductive substrate, a layer of field dielectric formed on the conductive substrate, a layer of conductive metal or conductive polycrystalline silicon formed on the field dielectric, and first and second laterally spaced apart layers of conductive material formed on the conductive metal or polycrystalline silicon. Each spaced apart layer preferably includes a layer of titanium nitride disposed over a layer of titanium. A layer of capacitor dielectric is deposited on the first of the spaced apart layers, and metal is deposited over the capacitor dielectric and the second layer of conductive material.

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