Integrated circuit alignment marks distributed throughout a surf

Details Integrated circuit alignment marks distributed throughout a surf Integrated circuit alignment marks distributed throughout a surf

1996-12-31

1999-08-10

Chaudhuri, Olik

Active solid-state devices (e.g., transistors, solid-state diode

Alignment marks

257 48, 257632, 438401, H01L 23544, H01L 2358

Patent

active

059363118

ABSTRACT:
A method and apparatus for using alignment marks to locate buried structures in integrated circuits is provided. An alignment mark is used to locate a circuit area to be operated on. Underlying features of the circuit area are located based on the known location of the alignment marks. These underlying features are then operated on.

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