Integrated chemical microreactor with large area channels...

Details Integrated chemical microreactor with large area channels... Integrated chemical microreactor with large area channels...

2007-05-01

2010-06-08

Beisner, William H (Department: 1797)

Chemistry: molecular biology and microbiology

Apparatus

Including measuring or testing

C436S049000, C257S414000, C257S522000

Reexamination Certificate

active

07732192

ABSTRACT:
The microreactor has a body of semiconductor material; a large area buried channel extending in the body and having walls; a coating layer of insulating material coating the walls of the channel; a diaphragm extending on top of the body and upwardly closing the channel. The diaphragm is formed by a semiconductor layer completely encircling mask portions of insulating material.

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