Integrated chemical microreactor, thermally insulated from...

Details Integrated chemical microreactor, thermally insulated from... Integrated chemical microreactor, thermally insulated from...

2005-08-16

2005-08-16

Thompson, Craig A. (Department: 2813)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Reexamination Certificate

active

06929968

ABSTRACT:
Integrated microreactor, formed in a monolithic body and including a semiconductor material region and an insulating layer; a buried channel extending in the semiconductor material region; a first and a second access trench extending in the semiconductor material region and in the insulating layer, and in communication with the buried channel; a first and a second reservoir formed on top of the insulating layer and in communication with the first and the second access trench; a suspended diaphragm formed by the insulating layer, laterally to the buried channel; and a detection electrode, supported by the suspended diaphragm, above the insulating layer, and inside the second reservoir.

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Zhang, “Automated and Integrated System for High- Throughput DNA Genotyping Directly from Blood”, Analytical Chemistry, vol. 71, No. 6, Mar. 1999.

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