Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor
Reexamination Certificate
2006-11-02
2011-12-27
Ha, Nguyen T (Department: 2835)
Electricity: electrical systems and devices
Electrostatic capacitors
Fixed capacitor
C361S301200, C361S301400, C361S306100, C361S303000, C361S305000
Reexamination Certificate
active
08085524
ABSTRACT:
An electronic device includes at least one trench capacitor that can also take the form of an inverse structure, a pillar capacitor. An alternating layer sequence of at least two dielectric layers and at least two electrically conductive layers is provided in the trench capacitor or on the pillar capacitor, such that the at least two electrically conductive layers are electrically isolated from each other and from the substrate by respective ones of the at least two dielectric layers. A set of internal contact pads is provided, and each internal contact pad is connected with a respective one of the electrically conductive layers or with the substrate. A range of switching opportunities is opened up that allows tuning the specific capacitance of the capacitor to a desired value.
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Roozeboom, F; et al “High-Density, Low-Loss MOS Capacitors for Integrated RF Decoupling” Proceedings 2001. International Symposium on Microelectronics (SPIE vol. 4587) IMAPS—International Microelectronics and Packaging Society, 2001, pp. 477-483, Oct. 9, 2001.
Kemmeren Antonius L. A. M.
Klootwijk Johan H.
Reefman Derk
Roozeboom Freddy
Verhoeven Johannes F. C. M.
Ha Nguyen T
Hamre Schumann Mueller & Larson P.C.
IPDIA
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