Integrated capacitive transducer

Details Integrated capacitive transducer Integrated capacitive transducer

1994-09-20

1997-10-14

Tran, Sinh

Electrical audio signal processing systems and devices

Electro-acoustic audio transducer

Having electrostatic element

381174, 381113, H04K 2500

Patent

active

056779658

ABSTRACT:
An integrated capacitive transducer (1) which includes a membrane having a movable part (4) with an electrode, a fixed plate (6) with a counter-electrode (8), and an electrode and counter-electrode support structure (10). The fixed plate (6) also has an electret (30) which is disposed facing the movable part (4), is separated from the membrane by an open space (16), and has a first electrically conductive layer (32) embedded in an insulating material (34, 36). The invention has particular applications in hearing aids.

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"Development of an electret microphone in silicon", A.J. Sprenkels et al., Journal of Sensors and Actuators, 17(1989), pp. 509-512.
"Fowler-Nordheim Tunneling Into Thermally Grown SiO.sub.2 ", M. Lenzlinger and E.H. Snow, Journal of Applied Physics, vol. 40, No. 1, Jan. 1969, pp. 278-283 and 515.
English Translation of Search Report in priority French Application No. 92 10947.

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