Integrated building and conveying structure for manufacturing un

Details Integrated building and conveying structure for manufacturing un Integrated building and conveying structure for manufacturing un

1993-09-14

1994-09-06

Yuen, Henry C.

Ventilation

Clean room

454193, B01L 104, F24F 7007

Patent

active

053443659

ABSTRACT:
A building houses a semiconductor manufacturing facility, which is circular in shape and is of a multi-story structure. A silo is located at the center for use in storing and transferring wafers to clean rooms disposed radially around the silo at each floor. Human access is not permitted in the silo and in the clean rooms in order to prevent contamination of the wafers. Due to the modularity of the clean room structures, clean rooms can be reconfigured easily without significant impact on the on-going manufacturing operation. The modularity also permits portions of the facility to be deactivated when not needed.

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