Metal working – Method of mechanical manufacture – Assembling or joining
Patent
1976-07-23
1977-04-19
Tupman, W.
Metal working
Method of mechanical manufacture
Assembling or joining
29576C, 29578, 29589, 29592, 96 362, B01J 1700
Patent
active
040179621
ABSTRACT:
An integrated array of optical fibers and thin film optical detectors is formed by constructing an array of optical detectors in registration with light-emitting portions of the optical fibers. A cadmium sulfide semiconducting film, grown upon a silicon substrate, is covered with an optically transparent and electrically conductive tin dioxide ground plane film. An array of optical fibers, having light-emitting ends in substantial contact with the conductive file, is mounted to a frame attached to such film. The frame and optical fibers are epoxy encapsulated above the conductive film; the substrate is then removed and photo resist applied over the newly exposed semiconducting film surface. Light transmitted directly through the optical fibers, and through the light-emitting portions thereof in contact with the conductive film, is used to activate, from a rear side, only those portions of the photo resist layer which are in exact registration with the light-emitting ends of the optical fibers. After removal of the activated portions of photo resist, a film of platinum is deposited through the resulting photo resist windows onto exposed portions of the semiconductor film, thereby forming photovoltaic diodes. Aluminum contacts are applied over the platinum and, after removal of the remaining photo resist, conductors are bonded to the contacts and the ground plane film. The resulting integrated assembly may be packaged with other electronic components in a hermetically sealed package. A method for fabricating an integrated array of optical fibers and thin film optical detectors is thereby provided.
REFERENCES:
patent: 3757127 (1973-09-01), Dhaka
patent: 3963920 (1976-06-01), Palmer
patent: 3968564 (1976-07-01), Springthorpe
Bissell Henry M.
General Dynamics Corporation
Johnson Edward B.
Tupman W.
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