Integrated ambient sensing devices and methods of manufacture

Details Integrated ambient sensing devices and methods of manufacture Integrated ambient sensing devices and methods of manufacture

1984-01-19

1988-04-19

James, Andrew J.

357 22, 357 34, 357 40, H01L 2966, H01L 2996

Patent

active

047393807

ABSTRACT:
An ambient sensing device is described especially suited to the sensing of a variety of ambient parameters. Photolithographic techniques are used to pattern a multiplicity of sensitive layers on a single monolithic substrate taking into account the wide range of plastic, gelatinous and ceramic materials to be patterned and the problems of their cross-contamination when in contact.

REFERENCES:
patent: 3605045 (1971-09-01), Ramsbotham, Jr.
patent: 3621367 (1971-11-01), Rosen
patent: 4238757 (1980-12-01), Schenck
patent: 4251621 (1981-02-01), Fraley et al.
patent: 4332658 (1982-06-01), Tsuboshima
patent: 4508613 (1985-04-01), Busta et al.
Barrett, R. M., "Etched Sheets Serve as Microwave Components", Electronics, Jun. 1952, pp. 114-118.

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