Integrated AFM sensor

Details Integrated AFM sensor Integrated AFM sensor

1994-02-16

1995-02-07

Williams, Hezron E.

Measuring and testing

Surface and cutting edge testing

Roughness

250306, 250307, H01J 3726, G01B 528

Patent

active

053867203

ABSTRACT:
An integrated AFM sensor includes a cantilever which has two beams extending from a support portion. The beams are integrated with each other at their ends to form a triangular free end, and a probe having a sharp distal end is arranged at the free end. The cantilever is formed by stacking a passivation layer, a piezoresistive layer, and a silicon layer. Electrodes electrically connected to the piezoresistive layer are formed at the fixed end of the cantilever through contact holes.

REFERENCES:
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patent: 4966037 (1990-10-01), Sumner et al.
patent: 5021364 (1991-06-01), Akamine et al.
patent: 5047637 (1991-09-01), Toda
patent: 5066358 (1991-11-01), Quate et al.
patent: 5072116 (1991-12-01), Kawade et al.
patent: 5075548 (1991-12-01), Kajimura
patent: 5092163 (1992-03-01), Young
patent: 5166520 (1992-11-01), Prater et al.
"Atomic force Microscopy Using A Piezoresistive Cantilever" by M. Tortonese et al; G.L. Report No. 4821; Transducers '91 (Mar. 1991).

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