Integrated accelerometer with a sensitive axis parallel to the s

Details Integrated accelerometer with a sensitive axis parallel to the s Integrated accelerometer with a sensitive axis parallel to the s

1993-12-22

1996-03-05

Williams, Hezron E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

7351436, G01P 15125

Patent

active

054957613

ABSTRACT:
An accelerometer with a mobile mass mechanically connected, via an insulator, to a conductive substrate by flexible beams. Mobile conductive teeth are integrally formed with the mobile mass. Fixed conductive teeth are joined to an insulator from the substrate and arranged in an alternating manner with the mobile conductive teeth. Fixed electrodes serving as an electrostatic screen are placed between the fixed teeth and the mobile teeth in such a way that each mobile tooth is intercalated between a fixed electrode and a fixed tooth so as to constitute a series of variable capacitance capacitors.

REFERENCES:
patent: 4653326 (1987-03-01), Danel et al.
patent: 4999735 (1991-03-01), Wilner
patent: 5337606 (1994-08-01), Bennett
Electronic Design, Aug. 8, 1991, Frank Goodenough, "Accelerometer's Micromachined Mass Moves" in Plane of IC; On-Chip Circuit Controls it and Senses G with Force-Balance Techniques 7 pages.
IEEE, 1991, James T. Suminto, "A Simple, High Performance Piezoresistive Accelerometer", pp. 104-107.

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