Integratable oxygen sensor

Details Integratable oxygen sensor Integratable oxygen sensor

1984-05-17

1986-05-06

Tung, T.

Chemical apparatus and process disinfecting, deodorizing, preser

Analyzer, structured indicator, or manipulative laboratory...

Means for analyzing gas sample

165136, 204425, 204426, G01N 2712, G01N 2746

Patent

active

045871051

ABSTRACT:
An O.sub.2 sensor built on a silicon chip which has a SiO.sub.2 dielectric layer bridging over a depression in the surface of the chip. A ZrO.sub.2 layer overlies the bridge and a pair of spaced apart palladium electrodes are on the surface of the ZrO.sub.2. A heater for the ZrO.sub.2 is embedded in the SiO.sub.2 bridge.

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patent: 4224280 (1980-09-01), Takahama et al.
patent: 4281642 (1981-08-01), Steinberg
patent: 4338281 (1982-06-01), Treitinger et al.
patent: 4351182 (1982-09-01), Schmidberger
patent: 4401967 (1983-08-01), Miwa et al.

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