Measuring and testing – Fluid pressure gauge – Diaphragm
Patent
1994-02-18
1995-07-11
Chilcot, Jr., Richard E.
Measuring and testing
Fluid pressure gauge
Diaphragm
29 2542, G01L 912
Patent
active
054310571
ABSTRACT:
A process for manufacturing an integratable capacitative pressure sensor includes the following steps, starting from a semiconductor substrate (1): application of a guard film (2), precipitation of a polycrystalline semiconductor film (4), doping the polycrystalline semiconductor film (4) and removal of the guard film (2) by etching; then insulating the semiconductor zone (7) from the semiconductor substrate (1), and applying an insulator film (8) on the insulated semiconductor zone (7). The pressure sensor product, which is compatible with CMOS circuits and has increased sensor accuracy, includes a semiconductor zone (7) insulated from the semiconductor substrate (1) and an insulator film (8) applied on the insulated semiconductor zone (7), the polycrystalline semiconductor film (4) being located on the insulator film (8) above the insulated semiconductor zone (7).
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Eichholz Jorg
Kandler Michael
Manoli Yiannakis
Mokwa Wilfried
Zimmer Gunther
Chilcot Jr. Richard E.
Dougherty Ralph H.
Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung
Oen William L.
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