Radiant energy – Infrared-to-visible imaging – Including detector array
Patent
1996-12-17
1998-11-10
Glick, Edward J.
Radiant energy
Infrared-to-visible imaging
Including detector array
25037008, H01L 2714, G01J 508, G01J 510
Patent
active
058347755
ABSTRACT:
A method of fabricating a focal plane array and the array having a integral slot shield which comprises fabricating a focal plane array having a plurality of detector elements. A layer of electrically insulating material having a planar top surface is then formed over the array. A reflective layer is then formed over the layer of electrically insulating material and the electrically insulating layer and reflective layer are etched only in the regions thereof over the detector elements to form slots over the detector elements. An absorbing layer is formed over the reflective layer. The absorbing layer is preferably an infrared-transparent dielectric having an optical thickness of about one quarter wavelength of the light frequency of interest with a metallic flash layer thereover having a thickness of from about 50 to about 60 Angstroms. The infrared dielectric is preferably one of zinc sulfide, zinc selenide, polyethylene and paraxylilene.
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Ehmke John C.
Franda Charles A.
Skokan Mark R.
Whicker Stephen L.
Glick Edward J.
Jiron Darren M.
Raytheon TI Systems Inc.
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