Integral resonator gyroscope

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C073S504120

Reexamination Certificate

active

11199004

ABSTRACT:
The present invention discloses an inertial sensor having an integral resonator. A typical sensor comprises a planar mechanical resonator for sensing motion of the inertial sensor and a case for housing the resonator. The resonator and a wall of the case are defined through an etching process. A typical method of producing the resonator includes etching a baseplate, bonding a wafer to the etched baseplate, through etching the wafer to form a planar mechanical resonator and the wall of the case and bonding an end cap wafer to the wall to complete the case.

REFERENCES:
patent: 392650 (1888-11-01), Watrous
patent: 4898031 (1990-02-01), Oikawa et al.
patent: 5203208 (1993-04-01), Bernstein
patent: 5226321 (1993-07-01), Varnham et al.
patent: 5421312 (1995-06-01), Dawson
patent: 5578976 (1996-11-01), Yao et al.
patent: 5646346 (1997-07-01), Okada
patent: 5665915 (1997-09-01), Kobayashi et al.
patent: 5728936 (1998-03-01), Lutz
patent: 5783749 (1998-07-01), Lee et al.
patent: 5894090 (1999-04-01), Tang et al.
patent: 5905202 (1999-05-01), Kubena et al.
patent: 5920012 (1999-07-01), Pinson
patent: 5987985 (1999-11-01), Okada
patent: 6009751 (2000-01-01), Ljung
patent: 6044705 (2000-04-01), Neukermans et al.
patent: 6145380 (2000-11-01), Macgugan et al.
patent: 6151964 (2000-11-01), Nakajima
patent: 6164134 (2000-12-01), Cargille
patent: 6182352 (2001-02-01), Deschenes et al.
patent: 6250157 (2001-06-01), Touge
patent: 6263552 (2001-07-01), Takeuchi et al.
patent: 6282958 (2001-09-01), Fell et al.
patent: 6289733 (2001-09-01), Challoner et al.
patent: 6349597 (2002-02-01), Folkmer et al.
patent: 6367326 (2002-04-01), Okada
patent: 6367786 (2002-04-01), Gutierrez et al.
patent: 6481284 (2002-11-01), Geen et al.
patent: 6481285 (2002-11-01), Shkel et al.
patent: 6513380 (2003-02-01), Reeds et al.
patent: 6515278 (2003-02-01), Wine et al.
patent: 6628177 (2003-09-01), Clark et al.
patent: 6629460 (2003-11-01), Challoner
patent: 6715352 (2004-04-01), Tracy
patent: 6796179 (2004-09-01), Bae et al.
patent: 6806557 (2004-10-01), Ding
patent: 6856217 (2005-02-01), Clark et al.
patent: 6985051 (2006-01-01), Nguyen et al.
patent: 2002/0066317 (2002-06-01), Lin
patent: 2003/0010123 (2003-01-01), Malvern et al.
patent: 2003/0029238 (2003-02-01), Challoner
patent: 2004/0055380 (2004-03-01), Shcheglov et al.
patent: 44 42 033 (1996-05-01), None
patent: 19719601 (1998-11-01), None
patent: 0 461 761 (1991-12-01), None
patent: 1055908 (2000-11-01), None
patent: 0 971 208 (2000-12-01), None
patent: 01129517 (1989-05-01), None
patent: WO 96/38710 (1996-12-01), None
patent: WO 98/15799 (1998-04-01), None
patent: WO 00/68640 (2000-11-01), None
patent: WO 01/44823 (2001-06-01), None
patent: WO 01/74708 (2001-10-01), None
Wright et al., “The HRG Applied to a Satellite Attitude Reference System,” Guidance and Control, AASAAS, 1994, 86:1-13.
Putty et al., “A Micromachined Vibrating Ring Gyroscope,” Solid State Sensor and Actuator Workshop, Transducer Research Foundation, Hilton Head, 1994, pp. 213-220.
Tang et al., “A Packaged Silicon MEMS Vibratory Gyroscope for Microspacecraft,” Proceedings IEEE, 10th Annual Int. Workshop on MEMS, Japan, 1997, pp. 500-505.
Barbour et al., “Micromechanical Silicon Instrument and Systems Development at Draper Laboratory,” AIAA Guidance Navigation and Control Conference, 1996, Paper No. 96-3709.
Johnson et al., “Surface Micromachined Angular Rate Sensor,” A1995 SAE Conference, Paper No. 950538, pp. 77-83.
Fujita et al., “Disk-shaped bulk micromachined gyroscope with vacuum sealing,” Sensors and Actuators A:Physical, vol. 82, May 2000, pp. 198-204.
Skulski et al., “Planar resonator sensor for moisture measurements”, Microwaves and Radar, 1998, MIKON '98, 12th International Conf., vol. 3, May 20-22, 1998, pp. 692-695.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Integral resonator gyroscope does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Integral resonator gyroscope, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Integral resonator gyroscope will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3949599

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.