Integral resonant support arms for piezoelectric microresonators

Details Integral resonant support arms for piezoelectric microresonators Integral resonant support arms for piezoelectric microresonators

1977-08-05

1979-02-13

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310367, 310368, H01L 4110

Patent

active

041397932

ABSTRACT:
Piezoelectric microresonators with suspension arms, oscillating according to a vibration resulting from the superposition of a principal extensional mode of oscillation, of a first shear coupled mode of oscillation and of a second extensional coupled mode of oscillation. The suspension arms are attached to the active part of the resonator in a place which is the intersection of a nodal plane of the vibration resulting of the superposition of the principal mode and of the first coupled mode of oscillation. The other end of the arms is fixed on a stiff support in a location which coincide with a node of their vibration.

REFERENCES:
patent: 3488530 (1970-01-01), Staudte
patent: 3581126 (1971-05-01), Omlin
patent: 3794867 (1974-02-01), Gibert et al.
patent: 3913195 (1975-10-01), Beaver
patent: 4025806 (1977-05-01), Weber

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