Integral pulse tube refrigerator and cryopump

Details Integral pulse tube refrigerator and cryopump Integral pulse tube refrigerator and cryopump

2007-01-23

2007-01-23

Doerrler, William C (Department: 3744)

Refrigeration

Gas compression, heat regeneration and expansion, e.g.,...

C062S055500

Reexamination Certificate

active

10500783

ABSTRACT:
An integrated cryopump and 2 stage pulse tube refrigeration system (100) comprising a cryopump, a compressor for a pulse tube refrigerator, a pulse tube refrigerator located within the vacuum chamber of the cryopump where the hot ends of the pulse tubes (165,175) are connected to each other through a buffer volume (180), are integral to the cryopump vacuum chamber hosing, and a buffer volume (180) is connected to the hot ends (117,119) of the pulse tubes (165,175) through flow restrictors (145,150).

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patent: 6263677 (2001-07-01), Hafner et al.
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patent: 2005/0000232 (2005-01-01), Longsworth
patent: 2005/0011200 (2005-01-01), Longsworth
patent: 2006/0026968 (2006-02-01), Gao
patent: 10-184540 (1998-07-01), None

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