Integral pre-aligned micro-optical systems

Optical waveguides – With optical coupler – Input/output coupler

Reexamination Certificate

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C385S137000

Reexamination Certificate

active

07421159

ABSTRACT:
An accurate and inexpensive integral micro-optical system for coupling and aligning optical fibers with other optical components, such as other optical fibers, diffusers, beam shapers, beam splitters, mirrors, or lenses is disclosed. The micro-optical coupler disclosed comprises one or more fiberport collimators and one or more microlens arrays, optically aligned during fabrication so that an optical fiber, or other source of light, was coupled to another optical fiber, or other light receiver, by simple inserting the optical source in one side of the micro-coupler and inserting the optical receiver in the other side of the micro-coupler. Often the fabrication process for this system can be done in a single lithography procedure. Since the optical axis of each component was aligned during the fabrication step, no subsequent alignment was required.

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Sato et. al., “A Novel Fabrication of In-Channel 3-D Micromesh Structure Using Maskless Multi-Angle Exposure and Its Microfilter Application,” Proceedings of the IEEE MEMS Conference, Kyoto, Japan (2003).

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