Integral fluid filter and capillary

Liquid purification or separation – Diverse distinct separators – Including a filter

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Details

210437, 210498, B01D 3100

Patent

active

045376808

ABSTRACT:
A comb filter including a first plurality of generally parallel grooves and a capillary including a second groove connected to the first plurality of grooves are integrally formed in a substrate such as by selective etching a surface of a semiconductor substrate. A cover is affixed to the surface and covers the etched grooves. An input line is connected to the filter and an output line is connected to the capillary. A second comb filter can be included in the output line.

REFERENCES:
patent: 2727632 (1955-12-01), Mack
patent: 2752731 (1956-07-01), Altosaar
patent: 3482703 (1969-12-01), Roberts et al.
patent: 4116836 (1978-09-01), DeAngelis
patent: 4283210 (1981-08-01), Mochida et al.

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