Measuring and testing – Volume or rate of flow – Thermal type
Patent
1984-07-25
1985-10-22
Goldstein, Herbert
Measuring and testing
Volume or rate of flow
Thermal type
357 55, G01F 168
Patent
active
045480788
ABSTRACT:
Disclosed is an integral flow sensor and channel assembly comprising a flow sensor having a sensing element integral to a semiconductor body. The assembly further comprises support structure for supporting the flow sensor, the support structure having a first surface. An enclosed flow channel comprises the first surface formed into a groove running below the sensing element. The flow channel comprises an inlet and an outlet for providing flow across the sensing element. The sensing element is located in the flow channel between the inlet and the outlet. The support structure comprises apparatus for flip-chip mounting the semiconductor body, and the semiconductor body is flip-chip mounted so that the sensing element is positioned over the groove in the support structure.
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Bohrer Philip J.
Higashi Robert E.
Johnson Robert G.
Goldstein Herbert
Honeywell Inc.
Sumner John P.
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