Integral differential and static pressure transducer

Details Integral differential and static pressure transducer Integral differential and static pressure transducer

1984-07-02

1985-07-16

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

338 4, G01L 906

Patent

active

045288550

ABSTRACT:
Differential and static pressure transducers are provided with piezoresistive elements connected in Wheatstone bridges on the 100 surface of a silicon chip over a diaphragm etched into the chip from the back. A thin disk diaphragm is used for differential pressure (DP) and a thicker annular diaphragm around the disk diaphragm is used for static pressure (SP) measurements. Two of the elements opposite each other in each bridge are produced along one crystallographic direction (110), and the other two are produced along an orthogonal crystallographic direction (110). Extra elements are produced for each pair to permit selection of a more closely matched set of four elements. A plurality of DP diaphragms with different diameters and respective bridges are provided along with a multiplexer for selecting a DP bridge in order to provide different ranges of sensitivity for the differential pressure measurements.

REFERENCES:
patent: 4222277 (1980-09-01), Kurtz et al.
patent: 4322980 (1982-03-01), Suzuki et al.
patent: 4442716 (1984-03-01), Coe et al.

Affiliated with

Also associated with

Rating

Integral differential and static pressure transducer does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Integral differential and static pressure transducer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Integral differential and static pressure transducer will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1730293