Integrable using amorphous magnetic material circuit inductor

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Passive components in ics

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257516, H01L 2941

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active

060693975

ABSTRACT:
An integrable circuit inductor (220) is formed from a patterned conductive material (110) that has a major portion completely encapsulated by a material (221, 223) that is substantially electrically non-conductive, and that has a magnetic response at the operating frequency of the inductor (220). Preferably, an amorphous ferrite material is used for encapsulation, which provides a closed magnetic flux path for the inductor (220) when processing a signal at its operating frequency.

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"Magnetically Ordered Amorphous Copper Ferrite," by G. Srinivasan, Uma Maheshwar Rao, J. Zhao and N.S. Seehra published in the Applied Physics Letters, 59 (3), by the American Institute of Physics, in Jul. 1991, pp. 372-374.
"Magnetization and Ferromagnetic Resonance Studies on RF Sputtered Amorphous BiFeO.sub.3 -CuFe.sub.2 0.sub.4," by B. Uma Maheshwar Rao and G. Srinivasan published in the Journal of Magnetism and Magnetic Materials, 1992, pp. 249-254.
"Effects of Sputtering Atmospheres on Magnetic Properties of Amorphous Films of BiFeO.sub.3 -ZnFe.sub.2 0.sub.4," by B. Uma Maheshware Rao and G. Srinivasan published in the Journal of Magnetism and Magnetic Materials, 1992, pp. L228-L230.
Chikazumi, S., Physics of Magnetism, John Wiley & Sons, Inc., 1978, pp. 330-332, QC753.2.C47.

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