Insulating resin composition and semiconductor device using the

Details Insulating resin composition and semiconductor device using the Insulating resin composition and semiconductor device using the

1989-05-02

1992-07-21

Bleutge, John C.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

From silicon reactant having at least one...

528 28, 528 38, C08G 7726

Patent

active

051323869

ABSTRACT:
Insulating resin composition for a semiconductor device having a multilevel interconnection layers formed by the resin and having a superior planarizing capability relative to a lower interconnection layer is provided, which resin being a cured product of a polyamic acid ester oligomer obtained by reacting an aromatic diamine and/or a diaminosiloxane with an aromatic tetracarboxylic acid ester obtained by reacting an aromatic tetracarboxylic acid dianhydride with an alcohol or alcohol derivative.

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