Insulating film and electronic device

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Passive components in ics

Reexamination Certificate

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C257S535000

Reexamination Certificate

active

11347319

ABSTRACT:
A capacitor includes a first electrode, an insulating film and a second electrode. The insulating film includes n layers of barrier layers each consisting of a material having a bandgap larger than a first bandgap and having a relative permittivity smaller than a first relative permittivity, and (n−1) layers of well layers each consisting of a material having a bandgap smaller than the first bandgap and having a relative permittivity larger than the first relative permittivity. The barrier layers and the well layers are stacked by turns. Discrete energy levels are formed in each of the well layers by a quantum effect. Thicknesses of the n layers of the barrier layers are not smaller than 2.5 angstroms. A thickness dm (angstrom) and a relative permittivity εm of an m-th barrier layer satisfying the condition: 2.5 >(d1/ε1+d2/ε2+. . . +dn/εn).

REFERENCES:
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patent: WO 02/31875 (2002-04-01), None
J. H. Haeni, et al., “Epitaxial Growth of the First Five Members of the Srn+1TinO3n+1Ruddlesden-Popper Homologous Series” Applied Physics Letters, vol. 78, No. 21, May 21, 2001, pp. 3292-3294.
R.A. McKee, et al., “Physical Structure and Inversion Charge at a Semiconductor Interface With a Crystalline Oxide”, Science, vol. 293, Jul. 20, 2001, pp. 468-471.

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