Insulated pad conditioner and method of using same

Details Insulated pad conditioner and method of using same Insulated pad conditioner and method of using same

2006-10-24

2006-10-24

Everhart, Caridad (Department: 2891)

Abrading

Machine

Rotary tool

C257SE21002, C438S692000, C451S444000

Reexamination Certificate

active

07125324

ABSTRACT:
A wafer planarization process with a conditioning tool having an electrical insulator that electrically insulates the abrasive surface of the conditioning tool. The electrical insulator extends the useful life of the abrasive surface of the conditioning tool by reducing the level of electrochemically driven corrosion.

REFERENCES:
patent: 5196353 (1993-03-01), Sandhu et al.
patent: 5531635 (1996-07-01), Mogi et al.
patent: 5637031 (1997-06-01), Chen
patent: 5807165 (1998-09-01), Uzoh et al.
patent: 5911619 (1999-06-01), Uzoh et al.
patent: 6001008 (1999-12-01), Fujimori et al.
patent: 6066030 (2000-05-01), Uzoh
patent: 6123612 (2000-09-01), Goers
patent: 6176992 (2001-01-01), Talieh
patent: 6263605 (2001-07-01), Vanell
patent: 6379223 (2002-04-01), Sun et al.
patent: 6494765 (2002-12-01), Gitis et al.
patent: 6517424 (2003-02-01), Wielonski et al.
patent: 6540597 (2003-04-01), Ohmori
patent: 6648731 (2003-11-01), Shin
patent: 6666754 (2003-12-01), Beckage
patent: 6722948 (2004-04-01), Berman
patent: 6848970 (2005-02-01), Manens et al.
patent: 2002/0042200 (2002-04-01), Fawcett
patent: 2003/0178320 (2003-09-01), Liu et al.
patent: 2004/0053560 (2004-03-01), Sun et al.
patent: 2005/0145484 (2005-07-01), Basol et al.
patent: WO 99/26758 (1999-06-01), None
patent: WO 00/26443 (2000-05-01), None
patent: WO 00/59682 (2000-10-01), None

Affiliated with

Also associated with

Rating

Insulated pad conditioner and method of using same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Insulated pad conditioner and method of using same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Insulated pad conditioner and method of using same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3694155