Insulated gate thyristor

Active solid-state devices (e.g. – transistors – solid-state diode – Regenerative type switching device – Combined with field effect transistor

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Details

257139, 257147, 257152, 257156, H01L 29745, H01L 29739

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active

059819847

ABSTRACT:
An insulated gate thyristor includes a first-conductivity-type base layer having a high resistivity, first and second second-conductivity-type base regions formed in a surface layer of the first-conductivity-type base layer, a first-conductivity-type source region formed in a surface layer of the first second-conductivity-type base region, and a first-conductivity-type emitter region formed in a surface layer of the second second-conductivity-type base region. The thyristor further includes a gate electrode layer formed on an insulating film over the first second-conductivity-type base region, an exposed portion of the first-conductivity-type base layer and the second second-conductivity-type base region, a first main electrode that contacts both the first second-conductivity-type base layer and first-conductivity-type source region, a second-conductivity-type emitter layer formed on the first-conductivity-type base layer, a second main electrode that contacts the second-conductivity-type emitter layer, a gate electrode that contacts the gate electrode layer, and an insulating film covering entire areas of surfaces of the second second-conductivity-type base region and first-conductivity-type emitter region. In this insulated gate thyristor, the first-conductivity-type base layer includes a locally narrowed portion which is interposed between the first and second second-conductivity-type base regions.

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M.S. Shekar et al., High Voltage Current Saturation in Emitter No. 7, Jul. 1991.
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B. Jayant Baliga, "The MOS-Gated Emitter Swtiched Thyristor", IEEE Electron Device Letters, vol. 11, No. 2, Feb. 1990.
V.A.K. Temple, "MOS Controlled Thyristors (MCT's)" IEDM, 1984.

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