Insulated gate bipolar transistor

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Charge transfer device

Reexamination Certificate

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Details

C257S370000

Reexamination Certificate

active

07821043

ABSTRACT:
An insulated gate bipolar transistor has a p-type emitter layer; an n-type buffer layer provided on the p-type emitter layer; an n-type base layer provided on the n-type buffer layer and having a higher resistivity than the n-type buffer layer; a p-type base layer provided in part of an upper surface of the n-type base layer; an n-type source layer provided in part of an upper surface of the p-type base layer; a trench extending through the n-type source layer and the p-type base layer to the n-type base layer; a gate electrode provided in the trench; and a gate insulating film provided between the gate electrode and an inner surface of the trench. The p-type emitter layer has a thickness of 5 to 50 μm and a dopant concentration of 2×1016to 1×1018cm−3.

REFERENCES:
patent: 6184546 (2001-02-01), Liu et al.
patent: 6333523 (2001-12-01), Sakamoto et al.
patent: 6399969 (2002-06-01), Twynam
patent: 6617641 (2003-09-01), Nakagawa et al.
patent: 6683343 (2004-01-01), Matsudai et al.
patent: 2005/0161746 (2005-07-01), Mauder et al.
patent: 2005/0258455 (2005-11-01), Schulze et al.
patent: 2002-261282 (2002-09-01), None
patent: 2002-305305 (2002-10-01), None

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