Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent
1976-12-01
1980-08-12
Mack, John H.
Chemistry: electrical and wave energy
Processes and products
Vacuum arc discharge coating
204195G, C23C 1500, G01N 2736
Patent
active
042171946
ABSTRACT:
A probe having a measuring device for polarographic, potentiometric, ther and like measurements has a high-resistance transducer which is provided with leads. A body of insulating material is arranged about the transducer and a metal-containing body is arranged about the insulating material. The metal-containing body includes a metal layer which is essentially free of pores and essentially impervious to the diffusion of liquid therethrough and which thus seals the insulating material against contamination by foreign matter. A metal layer which is essentially free of pores and essentially impervious to the diffusion of liquid therethrough may be formed by sputtering the metal onto a substrate using a high-frequency field at an output of 10 to 40 watts per square centimeter of target surface, the sputtering operation being carried out for a period of 5 to 10 minutes in an Ar atmosphere having a pressure of 8 .times.10.sup.-4 torr. An insulating layer may be formed by sputtering an insulating material onto a substrate using a high-frequency field and an atmosphere made up of a protective gas and a reactive gas having partial pressures such that the total pressure of the atmosphere is 8 .times.10.sup.-4 torr.
REFERENCES:
patent: 2563062 (1951-08-01), Perley
patent: 3314873 (1967-04-01), Lunsford
patent: 3476672 (1969-11-01), Snyder et al.
patent: 3619402 (1971-11-01), Wurm et al.
patent: 3880737 (1975-04-01), Brunt
patent: 3959107 (1976-05-01), Horner et al.
Saito, "J. Appl. Phys.," 1967, pp. 979-983.
Bicher et al., "J. Appl. Phys.," 1970, pp. 387-390.
Baumgartl Horst
Lubbers Dietrich W.
Saito Yukio
Leader William
Mack John H.
Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.v.
Striker Michael J.
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