Cleaning and liquid contact with solids – Apparatus – Sequential work treating receptacles or stations with means...
Reexamination Certificate
1999-03-22
2001-08-07
Stinson, Frankie L. (Department: 1746)
Cleaning and liquid contact with solids
Apparatus
Sequential work treating receptacles or stations with means...
C068S133000, C068S135000, C068S902000
Reexamination Certificate
active
06269822
ABSTRACT:
BACKGROUND OF THE INVENTION
The present invention relates to a device, respectively, a method for wet treatment of substrates in a container that contains a treatment fluid, whereby the substrates, on a substrate carrier, are introduced into the container.
From EP-A-0 385 536 a method for drying of semi-conductor wafers after treatment in a liquid is known. Furthermore, from this printed document it is known to treat wafers positioned in a cassette in a liquid bath whereby the wafers during treatment rest on supports within the cassette. After treatment, an auxiliary cassette is moved directly above the cassette with the wafers positioned within in the liquid. A blade-like lifting device lifts the wafers from the liquid whereby the wafers are dried. During lifting, the wafers are guided in lateral guides of the cassette and, after removal from the liquid, in lateral guides of the auxiliary cassette. When the wafers are completely lifted out of the liquid, the cassette is also lifted from the liquid and dried. The auxiliary cassette is moved in the upward direction so that the wafers again rest on the supports of the cassette outside of the liquid.
In such an arrangement there is however the problem that the wafers in the cassette within the container are not sufficiently aligned, respectively centered, so that they cannot be lifted without risk of damage into external guides, for example, in the aforementioned auxiliary cassette above the liquid. Even for a very minimal deviation from a vertical position, the wafers cannot safely be introduced into the external guides so that the risk of breakage is great. The transport cassettes are exposed to great temperature fluctuations, for example, during the treatment processes temperatures of up to 170° C. may occur, so that tolerance values cannot be maintained, respectively, the cassette may be deformed.
It is therefore an object of the present invention to provide a device for wet treatment with which the substrates in the treatment container and during removal from the treatment container can be aligned and centered as precisely as possible.
A further object of the invention is to provide a carrier for the substrates whose position in the treatment container is always defined, despite occurring temperature fluctuations during treatment. This is also intended for improving the alignment and centering of the substrates.
SUMMARY OF THE INVENTION
This object is inventively solved by providing the container with a receiving device for the substrates.
The object is furthermore solved by providing the device with at least one adapter insertable into the treatment container and having support locations for resting thereon the substrate carrier.
The object is also solved by a substrate carrier, having, for resting it in the container, at least two contact locations arranged centrally in the longitudinal and/or transverse direction.
An advantage of the present invention is that especially large substrates, for example, semiconductor wafers of a diameter of 300 mm, can be dried with the inventive device.
A further advantage of the invention is that with a separate receiving device for the substrates within the container, the cassettes and especially their receiving slots for the wafers can be constructed such that the cassette during outflow of the treatment fluid can be optimally dried. For an optimal alignment of the substrates there are provided especially narrow portions within the guide slots for the substrates which are very difficult to dry.
A further advantage of the inventive device is that with the inventively provided adapters substrate carriers of different sizes can be introduced into the same container and can be secured in a defined position.
An inventive substrate carrier has the advantage that the defined position of the substrate carrier will not change even when a deformation of the substrate carrier due to temperature fluctuations occurs.
According to a preferred embodiment of the invention the receiving device for the substrates and the substrate carrier are movable relative to one another. With this relative movement the transfer of the substrates, held within the substrate carrier for introduction into the container, into the receiving device provided within the container is realized.
Advantageously, the relative movement of the receiving device for the substrates and the substrate carrier is performed in the vertical direction. Thus, drying of the substrates can be performed most effectively because in this manner the treatment fluid adhering to the substrates upon passing through the liquid surface can be removed in the easiest fashion. Furthermore, with a vertical relative movement between the receiving device for the substrates and the substrate carrier, the transfer of the substrates from the substrate carrier into the receiving device for the substrates or the transfer of the substrates back into the substrate carrier in a continuous movement can be combined with removal and drying of the substrates or the substrate carrier.
According to a further preferred embodiment of the invention, the device comprises a first transport carriage for the substrate receiving device and a second transport carriage for the substrate carrier. Preferably, the second transport carriage comprises a substrate carrier receiving unit. Advantageously, the substrate carrier comprises a substrate carrier opening and the substrate receiving unit a receiving opening through which the receiving device can be moved in the vertical direction. Thus, a relative movement between the receiving device for the substrates and the substrate carrier is possible. These substrates are centered within the substrate receiving device and are removed in a continuous movement from the treatment fluid of the container and dried.
Advantageously, the receiving device comprises slots for centering the substrates. Advantageously, the width of the slots tapers from the slot opening to the slot bottom. Especially, one wall of the slot is vertical and another wall of the slot is slanted at a certain angle to the vertical. Due to this special slot shape an optimal centering of the substrate by clamping within the substrate receiving device is possible. Such an embodiment of the slots is advantageous with respect to the centering of the substrates in the receiving device; however, the substrates, during removal from the treatment fluid, should not be secured in such clamping slots because, otherwise, remains of the treatment fluid cannot be removed from the substrates, respectively, the receiving device.
Advantageously, the slot walls in the slot opening area have a second predetermined angle relative to the vertical whereby the second predetermined angle is greater than the first predetermined angle. Thus, a very easy introduction of the substrates into the clamping slots result.
According to a further preferred embodiment of the invention, the container comprises a blade-shaped lifting device for the substrates which is especially a blade-shaped strip that is movable in the vertical direction through an opening in the receiving device, through the substrate carrier opening, and through the receiving opening. The blade-shaped lifting device accordingly can support in a continuous movement the substrates and the receiving device or the substrates alone, when the substrates engage external guides, for example, above the container. The blade-shaped lifting device has the special advantage that, when the substrates are just about to exit through the liquid surface, the drops at the blade-shaped strip flow downwardly.
According to a further preferred embodiment of the invention the device comprises a hood to be attached on top of the container. Advantageously, the hood is provided at least at one inner wall with guide slots for the substrates. The slots in the substrate receiving device are embodied to match the guide slots in the hood. The hood serves a dual purpose. On the one hand, the hood contains an atmosphere of a vapor so that drying by the Marangoni effect is poss
Funkhanel Jurgen
Meister Dieter
Weber Martin
Wehrle Felix
Robert W. Becker & Associates
Steag MicroTech GmbH
Stinson Frankie L.
LandOfFree
Installation for wet-treating substrates does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Installation for wet-treating substrates, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Installation for wet-treating substrates will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2496064