Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
Reexamination Certificate
2006-05-30
2006-05-30
Tran, Khoi H. (Department: 3651)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Article handling
Reexamination Certificate
active
07054714
ABSTRACT:
An installation for processing a semiconductor wafer includes a semiconductor fabrication device having a load port, on which an identity code that can be read optically or through an effective electromagnetic field is stored. A mobile device, for example, a container communicating with the load port or a vehicle for transporting such a container, contains a corresponding reader to determine the identifier. The configuration makes the flexible determination of position within a fabrication facility possible. Also provided is a method for operating the installation.
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Hocke Christoph
Kübart Gregor
Lering Michael
Greenberg Laurence A.
Infineon - Technologies AG
Locher Ralph E.
Stemer Werner H.
Tran Khoi H.
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