Installation for making available highly pure fine chemicals

Details Installation for making available highly pure fine chemicals Installation for making available highly pure fine chemicals

2006-06-27

2006-06-27

Chambers, A. Michael (Department: 3753)

Fluid handling

Processes

Cleaning, repairing, or assembling

C137S377000, C137S382000, C118S728000

Reexamination Certificate

active

07066191

ABSTRACT:
A system and method for providing process chemicals. The system includes a housing comprising a functional component positioned in a first compartment, a control module positioned in a second compartment and at least one connecting line positioned in a third compartment. At least one compartment is positioned in a defined location in the housing. Modules may be removable received in their respective compartments.

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