Abrading – Machine – Combined
Patent
1998-09-17
2000-05-16
Scherbel, David A.
Abrading
Machine
Combined
451 56, 451443, 451444, 451303, 451296, B24B 700
Patent
active
06062955&
ABSTRACT:
A chemical-mechanical polishing station having a belt-operated conditioner. The belt-operated conditioner comprises a longitudinal main body, a belt sprinkled with hard particles, and a plurality of rollers. The belt wraps around the external edge of the longitudinal main body and is capable of rotating at a constant speed. The axles of the roller are parallel to each other. Furthermore, all the rollers are positioned within but touching the belt. Consequently, the rollers can rotate when they are driven by the belt. The hard particles sprinkled along the belt are used for scouring the polishing pad so that polishing pad surface can be reconditioned and any residual impurity particles can be removed. The belt-operated conditioner further includes a cleaning device. The cleaning device is used for removing any impurity particles clinging onto the belt when the conditioner is in operation.
REFERENCES:
patent: 3550320 (1970-12-01), Kenyon et al.
patent: 5384986 (1995-01-01), Hirose et al.
patent: 5484323 (1996-01-01), Smith
patent: 5643044 (1997-07-01), Lund
patent: 5643067 (1997-07-01), Katsuoka et al.
patent: 5692947 (1997-12-01), Talieh et al.
McDonald Shantese
Scherbel David A.
Worldwide Semiconductor Manufacturing Corp.
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