Installation and process for the distribution of very high purit

Details Installation and process for the distribution of very high purit Installation and process for the distribution of very high purit

1992-11-13

1994-02-22

Rivell, John

Fluid handling

Processes

137561R, 137209, F17D 104

Patent

active

052878732

ABSTRACT:
The conduits (1-4) of length L have a linear section S.sub.1 and contain a volumetric flow rate of nitrogen Q such that, to obtain a molar concentration of impurities upon out-gassing less than C.sub.max, Q/S.sub.1 is not less than 9.5.times.10.sup.-9 L/C.sub.max. The conduits are of stainless steel with a low carbon content, not electropolished and/or chemically treated. The joints (6, 7, 9, 11) between the conduits and/or the active members (5) are maintained externally in a neutral protective atmosphere confined in a sealed casing (8, 9 . . . ) Application particularly to electronic industries.

REFERENCES:
patent: 4859375 (1989-08-01), Lipisko et al.
patent: 5148945 (1992-09-01), Gaetz

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