Inspection unit and method of manufacturing substrate

Details Inspection unit and method of manufacturing substrate Inspection unit and method of manufacturing substrate

2005-05-17

2005-05-17

Le, N. (Department: 2858)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

Reexamination Certificate

active

06894515

ABSTRACT:
The present invention provides an inspection unit capable of allowing a probe and other components to be positioned with a high degree of accuracy while preventing misalignment of the probe and to be arranged closer to each other. The inspection unit includes a probe14afor supplying an inspection signal in contact with a circuit wiring, and a board12having an electrode13printed thereon to detect the supplied inspection signal to the circuit wiring in non-contact with the circuit wiring. The board12includes a bore12aallowing the probe14ato be penetratingly disposed therein. The bore12ais adapted to guide the axial movement of the probe14a. A circuit wiring having branch portions branched halfway therefrom can be inspected by using a less number of non-contact sensors.

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