Inspection tool with a 3D point sensor to develop a focus map

Details Inspection tool with a 3D point sensor to develop a focus map Inspection tool with a 3D point sensor to develop a focus map

2007-01-30

2007-01-30

Allen, Stephone B. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

C250S559190, C250S559220, C356S630000, C382S145000

Reexamination Certificate

active

10622848

ABSTRACT:
An inspection system, and process for use thereof, for inspecting semiconductors or like substrates. The inspection system includes an inspection device and an auxiliary sensor apart from the inspection device. The auxiliary sensor is used to collect height data and generate a map of a semiconductor or like substrate to aids in focusing the inspection device.

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