Inspection tool for testing and adjusting a projection unit...

Details Inspection tool for testing and adjusting a projection unit... Inspection tool for testing and adjusting a projection unit...

2005-02-01

2005-02-01

Pihulic, Daniel T. (Department: 3662)

Optics: measuring and testing

Lens or reflective image former testing

Statutory Invention Registration

active

H0002114

ABSTRACT:
An inspection system and method are disclosed. The inspection system is configured to inspect a projection unit having multiple optical subsystems. The optical subsystems are configured to project an image during a lithography step. The inspection system provides self calibration by measuring both a test mask and the aerial image of the test mask with the same detector assembly. The inspection system is also capable of measuring multiple fields simultaneously using multiple detectors and 6 axis interferometry to accurately determine the position of each detector. Additionally, the inspection system is capable of measuring the distance between the test mask and the detector assembly with an indirect path around the projection unit which normally blocks the direct path.

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