Optics: measuring and testing – Refraction testing – Prism engaging specimen
Patent
1976-03-25
1977-08-09
Corbin, John K.
Optics: measuring and testing
Refraction testing
Prism engaging specimen
356199, G02B 2717
Patent
active
040407454
ABSTRACT:
This patent discloses an improved inspection tool for rapidly inspecting miniature electronic conductor patterns, circuits and the like. The tool focuses a laser beam to a small laser spot that raster scans a large conductor pattern area on the workpiece being inspected. Reflected laser light from the workpiece impinges upon a light detector that generates electrical signals according to the presence or absence of conductor pattern materialon the workpiece at the momentary X and Y coordinate of the scanning laser spot. The light detector signals are compared with a previously encoded data image of the correct circuit pattern for the X and Y coordinates of the scanning laser spot. When the signals and the data agree at all X and Y coordinate points the workpiece is accepted. If the signals and the data do not agree at one or more X and Y coordinate points a defect in the circuit pattern is indicated. A defect may indicate out-of-tolerance dimensions, possible electrical short circuits, and/or open circuits. The extent of a defect may be determined by adjacent X and Y coordinate points and suitable computer programming, while workpieces having extended or out-of-tolerance defects are rejected. The improved disclosed inspection tool includes apparatus for automatically compensating for variations in the workpieces, and to effect registration for the scanning laser spot.
REFERENCES:
patent: 3253498 (1966-05-01), Lindberg et al.
patent: 3809806 (1974-05-01), Walker et al.
patent: 3854823 (1974-12-01), Loxham
patent: 3856412 (1974-12-01), Zanoni
Belleson James Garman
Clark Kendall
Corbin John K.
International Business Machines - Corporation
Powers Henry
Rosenberger R. A.
LandOfFree
Inspection tool does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Inspection tool, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Inspection tool will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1225166