Inspection systems having rotating motion

Details Inspection systems having rotating motion Inspection systems having rotating motion

1990-05-16

1992-03-17

McGraw, Vincent P.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

356426, G01N 2188

Patent

active

050962914

ABSTRACT:
A positioning system is provided for positioning a part or element in different inclinations relative to a plane normal to a central axis, and for also rotating the part about the central axis. A holder supporting the part is freely pivotable about a point on the central axis. A central spindle on the axis is coupled to a concentric tiltable ring assembly that is controllable in two directions of freedom from an input device. The tilt and rotational motions of the ring assembly are translated to the part holder by a multi-element linkage mechanism having low friction bearings at each end and allowing a wide range of motion. The part may be a semiconductor wafer to be inspected for flaws on a holder comprising a vacuum chuck. Alternatively the tiltable, rotatable mechanism may be used to support an optical camera or viewing device, or a robotic mechanism, for operation within a wide field.

REFERENCES:
patent: 4893932 (1990-01-01), Knollenberg

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