Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2007-05-21
2010-06-29
Toatley, Jr., Gregory J (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S237100, C356S239700, C356S445000
Reexamination Certificate
active
07746462
ABSTRACT:
An inspection system and method is provided herein for increasing the detection range of the inspection system. According to one embodiment, the inspection system may include a photodetector having a plurality of stages, which are adapted to convert light scattered from a specimen into an output signal, and a voltage divider network coupled for extending the detection range of the photodetector (and thus, the detection range of the inspection system) by saturating at least one of the stages. This forces the photodetector to operate in a non-linear manner. However, measurement inaccuracies are avoided by calibrating the photodetector output to remove any non-linear effects that may be created by intentionally saturating the at least one of the stages. In one example, a table of values may be generated during a calibration phase to convert the photodetector output into an actual amount of scattered light.
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International Search Report & Written Opinion, PCT/US2008/063541, mailed Sep. 3, 2008.
Cai Zhongping
Romanovsky Anatoly
Slobodov Alexander
Wolters Christian H.
Alli Iyabo S
Daffer Kevin L.
Daffer McDaniel LLP
KLA-Tencor Technologies Corporation
Toatley Jr. Gregory J
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