Inspection system for detecting defects in regular patterns

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Details

250563, 3401463Q, 356237, 358106, 364819, G06F 1520, G06F 15336

Patent

active

043498809

ABSTRACT:
The inspection system detects defects in regular patterns wherein the elements of the patterns may have variations in period. In the system a camera, having a photoelectric sensor therein, is mechanically moved to permit the sensor to scan and detect the elements of a pattern. The system includes circuitry for processing the output of the sensor. The circuitry includes portions for quantizing the sensor output signal, for storing the quantized signal of a portion of a scan, for determining element period from the quanitized signal and for controlling the output of the storage portion at times related to element period. The circuitry also includes portions for correlating the output from the storing portion with a real time quantized signal of the same scan and for indicating the presence of an error related to a pattern defect in response to a miscorrelation signal from the correlating portion.

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patent: 4149120 (1979-04-01), Richter

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