Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
Patent
1996-11-25
1998-06-16
Pham, Hoa Q.
Optics: measuring and testing
Inspection of flaws or impurities
Having predetermined light transmission regions
359205, 356239, G01N 2100
Patent
active
057679622
ABSTRACT:
An inspection system includes a light source, a scanning device for scanning a surface to be inspected, with light from the light source, wherein the scanning device includes an optical member disposed with inclination with respect to a primary scan direction, the optical member being adapted to provide a convergent light being converged to form a spot at a distance changeable with the position of a scan, and a light receiving device for receiving scattered light from the surface.
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patent: 5270794 (1993-12-01), Tsuji et al.
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Miyazaki Kyoichi
Nose Noriyuki
Suzuki Masayuki
Takeuchi Seiji
Tsuji Toshihiko
Canon Kabushiki Kaisha
Pham Hoa Q.
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