Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Quality evaluation
Reexamination Certificate
2007-06-12
2010-06-15
Wachsman, Hal D (Department: 2857)
Data processing: measuring, calibrating, or testing
Measurement system in a specific environment
Quality evaluation
C702S057000, C702S117000, C702S124000
Reexamination Certificate
active
07739065
ABSTRACT:
Methods for determining customized defect detection inspection plans are provided. One method includes fabricating a test chip and generating test chip data from the fabricated test chip. Then, defining systematic signatures from the generated test chip data and identifying a yield relevant systematic signature from the defined systematic signatures. The method includes identifying a layout pattern associated with the yield relevant systematic signature and locating the identified layout pattern on a process module layer of a product chip. Further, the method includes defining a customized defect detection inspection or metrology methodology for detecting systematic defects on the process module layer based on the identified layout pattern associated with the yield relevant systematic signature.
REFERENCES:
patent: 6269179 (2001-07-01), Vachtsevanos et al.
patent: 6433561 (2002-08-01), Satya et al.
patent: 7061625 (2006-06-01), Hwang et al.
patent: 7107158 (2006-09-01), Steele et al.
patent: 2004/0254752 (2004-12-01), Wisniewski et al.
patent: 2007/0156379 (2007-07-01), Kulkarni et al.
Harris Kenneth R.
Joseph David
Lee Sherry F.
PDF Solutions, Incorporated
Suarez Felix E
Wachsman Hal D
LandOfFree
Inspection plan optimization based on layout attributes and... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Inspection plan optimization based on layout attributes and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Inspection plan optimization based on layout attributes and... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4195565