Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate
2006-07-25
2006-07-25
Parker, Kenneth (Department: 2815)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
C257S048000, C257SE21521, C438S014000
Reexamination Certificate
active
07081758
ABSTRACT:
An inspection pattern, an inspection method, and an inspection system for detection of a latent defect of a multi-layer wiring structure formed on the semiconductor wafer. The inspection pattern includes lower-layer wiring portions, upper-layer wiring portions, an insulating layer provided between them, contact units connecting them to form a contact chain, and electrode terminals. The inspection method includes the steps of acquiring an applied-voltage versus measured-current characteristic or an elapsed-time versus measured-voltage characteristic of the inspection pattern, and judging presence or absence of a latent defect of the inspection pattern on the basis of the acquired characteristic. The inspection system includes a voltage-applying/current-measuring device or a constant-current-feeding/voltage-measuring device, and a judging device for judging presence or absence of a latent defect of the inspection pattern.
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Fukunaga Hiroyuki
Nakayashiki Hiroyuki
Umemura Eiichi
Díaz José R.
Oki Electric Industry Co. Ltd.
Parker Kenneth
VolentineFrancos&Whitt PLLC
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