Inspection of transparent substrates for defects

Details Inspection of transparent substrates for defects Inspection of transparent substrates for defects

2007-05-08

2007-05-08

Nguyen, Sang H. (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S239100, C356S239200, C356S239300

Reexamination Certificate

active

11414076

ABSTRACT:
Methods, apparatus and systems for the detection of defects in transparent substrates such as glass sheets are disclosed. The methods, apparatus and systems are capable of detecting optical path length variations in transparent substrates smaller than 100 nm.

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