Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2006-08-01
2006-08-01
Stafira, Michael P. (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S237400, C356S239200
Reexamination Certificate
active
07084970
ABSTRACT:
In an inspection system for electrical and electro-optical inspection of TFT-LCD panels, a fine resolution area imaging camera with a pulse illumination source disposed to scan the region and operative capture images of the region illuminated with pulses of short illumination and automatically maintained in focus while continuously scanning in order to resolve points of defects.
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Saranli Afsar
Weiss Adam
Photon Dynamics, Inc.
Stafira Michael P.
Townsend and Townsend / and Crew LLP
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