Optics: measuring and testing – By polarized light examination – With light attenuation
Patent
1998-07-28
2000-02-22
Pham, Hoa Q.
Optics: measuring and testing
By polarized light examination
With light attenuation
356375, 25055923, G01B 1114
Patent
active
060286733
ABSTRACT:
An inspection beam is cast onto an inspection surface of a bump-attached circuit board, which inspection surface is provided with a plurality of solder bumps, and scanned within the inspection surface two-dimensionally while allowing its reflected beam to be received at PSD (Position Sensing Device). On the basis of detection output from a beam receiving section at that moment, information on heights at respective positions within the inspection surface and information on the brightness of the reflected beam are prepared. On the basis of the prepared reflected beam brightness information, an existing region of a top face of each bump (bump top face existing region) is fixed. By using information on height of each bump which is prepared on the basis of the information on the size or area of the bump top face existing region and the respective heights within the bump top face existing region, information on volume of each bump is prepared. A height value range is divide to a plurality of range sections by means of one or more hold values. The height value range sections are associated one-to-one with depths and/or colors of pixels of a splay device for thereby associating the depths or colors of the pixels corresponding to the respective positions within the inspection surface with height values at the respective positions, which is indicated by the height information. Mapping output representative of the height distribution on the inspection surface is supplied to the display device.
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Kotagiri Akira
Matsubara Yoichi
Nagasaki Masato
Tsunekawa Tomoyoshi
NGK Spark Plug Co. Ltd.
Pham Hoa Q.
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