Inspection method of semiconductor device and inspection system

Details Inspection method of semiconductor device and inspection system Inspection method of semiconductor device and inspection system

2005-02-22

2005-02-22

Zarneke, David (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S1540PB

Reexamination Certificate

active

06859060

ABSTRACT:
An inspection technique for enabling an inspection on a wafer at an early stage during a wafer process. A wafer in a process is irradiated with an electron beam a plurality of times at predetermined intervals under a condition that a junction is backward biased, and secondary electron signals are monitored, so as to evaluate relax time characteristic of a backward bias potential in a p-n junction. Since the potential in the p-n junction decreases according to the intensity of a backward bias current in intermittent time, a backward bias current can be specified from an intensity signal interrelated with the number of secondary electron signals, that is, a potential contrast image on the basis of image information.

REFERENCES:
patent: 4736159 (1988-04-01), Shiragasawa et al.
patent: 6002792 (1999-12-01), Oguri et al.
patent: 6329826 (2001-12-01), Shinada et al.
patent: 6344750 (2002-02-01), Lo et al.
patent: 6504393 (2003-01-01), Lo et al.
patent: 6509750 (2003-01-01), Talbot et al.
patent: 6559663 (2003-05-01), Shinada et al.
patent: 6566897 (2003-05-01), Lo et al.
patent: 6583634 (2003-06-01), Nozoe et al.
patent: 6586952 (2003-07-01), Nozoe et al.
patent: 20030057971 (2003-03-01), Nishiyama et al.

Affiliated with

Also associated with

Rating

Inspection method of semiconductor device and inspection system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Inspection method of semiconductor device and inspection system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Inspection method of semiconductor device and inspection system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3500100