Inspection method, inspection apparatus, and facility...

Details Inspection method, inspection apparatus, and facility... Inspection method, inspection apparatus, and facility...

2006-07-18

2006-07-18

Nghiem, Michael (Department: 2863)

Data processing: measuring, calibrating, or testing

Measurement system

Performance or efficiency evaluation

C382S228000, C702S034000, C702S083000

Reexamination Certificate

active

07079979

ABSTRACT:
To inspect a status of an inspection object by using an inspection apparatus for extracting amount of characteristic to an inputted waveform signal and determining a status on the basis of the extracted amount of characteristic. Specifically, the inspection apparatus uses a normal knowledge that is generated on the basis of only the data of a normal status at an initial stage to determine whether or not the status of the inspection object complies with the normal status. The inspection apparatus generates an abnormal kind knowledge by abnormal kind on the basis of the data of an abnormal status that are collected in accordance with repeat of the determination, and then, determines the status by using the normal knowledge and the abnormal kind knowledge.

REFERENCES:
patent: 5210704 (1993-05-01), Husseiny
patent: 5566092 (1996-10-01), Wang et al.
patent: 11-173909 (1999-07-01), None
patent: 11-173956 (1999-07-01), None
patent: 2001-091414 (2001-04-01), None

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