Inspection method and inspection apparatus for field-emission co

Details Inspection method and inspection apparatus for field-emission co Inspection method and inspection apparatus for field-emission co

1996-02-14

1998-03-24

Bradley, P. Austin

Electric lamp or space discharge component or device manufacturi

Process

With testing or adjusting

445 63, H01J 942

Patent

active

057306346

ABSTRACT:
An inspection apparatus including an XY movable table onto which an inspection object wafer is placed in position and a prober for detecting electrons emitted from a field-emission cold cathode of the wafer is provided in a vacuum chamber. A characteristic of the field-emission cold cathode is inspected before it is mounted onto a device.

REFERENCES:
patent: 4894611 (1990-01-01), Shimoda et al.
patent: 5591061 (1997-01-01), Ikeda et al.
C. A. Spindt, "A Thin-Film Field-Emission Cathode", J. Applied Physics, vol. 39, No. 7, Jun. 1968, pp. 3504-3505.
J. Browning, "Experimental Observations of Gated Field Effect Transmitter Failures," 8179 IEEE Electron Device Letters 13 (1992) Mar., No. 3, pp. 167-169.
H. Busta, "Design of High-Vacuum Test Station for Rapid Evaluation of Vacuum Microelectronic Devices," 8093 IEEE Transactions on Electron Devices 38 (1991) Oct., No. 10, pp. 2350-2354.

Affiliated with

Also associated with

Rating

Inspection method and inspection apparatus for field-emission co does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Inspection method and inspection apparatus for field-emission co, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Inspection method and inspection apparatus for field-emission co will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2284621