Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2007-02-02
2010-12-14
Glick, Edward J (Department: 2882)
Photocopying
Projection printing and copying cameras
Step and repeat
C356S237200
Reexamination Certificate
active
07852459
ABSTRACT:
A scatterometer has a radiation source capable of emitting radiation in distinct first and second wavelength ranges. An adjustable optical element is provided to effect a chromatic correction as necessary according to which wavelength range is in use. A single scatterometer can thereby effect measurements using widely separated wavelengths.
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Notice of Reasons for Rejection mailed Sep. 1, 2010 for Japanese Patent Application No. 2008-139438, 3 pgs.
Den Boef Arie Jeffrey
Joobeur Adel
Smirnov Stanislav Y.
Asfaw Mesfin T
ASML Netherlands B.V.
Glick Edward J
Sterne Kessler Goldstein & Fox P.L.L.C.
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